Effects of N2 and NH3 plasma exposure on the surface...

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Surfaces and Interfaces 2018 / 12

Effects of N2 and NH3 plasma exposure on the surface topography of p-GaN under quasi-atmospheric pressure

Kumagai, Naoto, Itagaki, Hirotomo, Kim, Jaeho, Ogiso, Hisato, Wang, Xue-lun, Hirose, Shingo, Sakakita, Hajime
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Language:
english
Journal:
Surfaces and Interfaces
DOI:
10.1016/j.surfin.2018.12.001
Date:
December, 2018
File:
PDF, 972 KB
english, 2018
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