[IEEE 2018 33rd Symposium on Microelectronics Technology and Devices (SBMicro) - Bento Gonçalves, Brazil (2018.8.27-2018.8.31)] 2018 33rd Symposium on Microelectronics Technology and Devices (SBMicro) - Characterization by GISAXS and Electrochemical Impedance Spectroscopy of porous oxide films

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