[Laser Institute of America ICALEO® 2011: 30th International Congress on Laser Materials Processing, Laser Microprocessing and Nanomanufacturing - Orlando, Florida, USA (October 23–27, 2011)] International Congress on Applications of Lasers & Electro-Optics - 355Nm DPSS UV laser micromachining of single-crystal silicon
Yang, Huan, Duan, Jun, Zeng, Xiaoyan, Cao, YuYear:
2011
Language:
english
DOI:
10.2351/1.5062185
File:
PDF, 871 KB
english, 2011