A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films
Zagho, Moustafa M., Dawoud, Hana D., Bensalah, Nasr, Altahtamouni, T. M.Language:
english
Journal:
Emergent Materials
DOI:
10.1007/s42247-018-0018-9
Date:
November, 2018
File:
PDF, 1.03 MB
english, 2018