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[IEEE 2018 IEEE Symposium on VLSI Technology - Honolulu, HI (2018.6.18-2018.6.22)] 2018 IEEE Symposium on VLSI Technology - High-sensitivity and low-power inertial MEMS-on-CMOS sensors using low-temperature-deposited poly-SiGe film for the IoT era
Tomizawa, Hideyuki, Kurui, Yoshihiko, Akita, Ippei, Fujimoto, Akira, Saito, Tomohiro, Kojima, Akihiro, Shibata, HidekiYear:
2018
Language:
english
DOI:
10.1109/VLSIT.2018.8510620
File:
PDF, 1.91 MB
english, 2018