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Simulation Of Ultra Shallow Junction Formation For Nano Devices Applications By Dopant Diffusion From Spin On Glasses
N. Hamat, Nik Hazura, Hashim, Uda, Ahmad, IbrahimVolume:
45
Language:
english
Journal:
Jurnal Teknologi
DOI:
10.11113/jt.v45.336
Date:
December, 2006
File:
PDF, 5.54 MB
english, 2006