[IEEE 2018 IEEE Research and Applications of Photonics In Defense Conference (RAPID) - Miramar Beach, FL (2018.8.22-2018.8.24)] 2018 IEEE Research and Applications of Photonics In Defense Conference (RAPID) - Electrical and Structural Characterization of Si Implanted Homoepitaxially Grown AlN
Breckenridge, M. Hayden, Tweedie, James, Hernandez-Balderrama, Luis, Kirste, Ronny, Klump, Andrew, Collazo, Ramon, Reddy, Pramod, Sitar, ZlatkoYear:
2018
Language:
english
DOI:
10.1109/rapid.2018.8508915
File:
PDF, 424 KB
english, 2018