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Deposition and Determination of Band Alignment of Al2O3/Si Gate Stacks by New CVD Chemistry
He, Gang, Zhang, Jiwen, Chen, Xuefei, Deng, Bin, Song, Xueping, Sun, ZhaoqiVolume:
26
Year:
2014
Language:
english
Journal:
Asian Journal of Chemistry
DOI:
10.14233/ajchem.2014.17314
File:
PDF, 283 KB
english, 2014