Fabrication of high fill-factor aspheric microlens array by...

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Microsystem Technologies 2018 / 11

Fabrication of high fill-factor aspheric microlens array by dose-modulated lithography and low temperature thermal reflow

Zhu, Junjie, Li, Mujun, Qiu, Jinfeng, Ye, Huichun
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4226-2
Date:
November, 2018
File:
PDF, 1.73 MB
english, 2018
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