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Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion Etching
Linnik, Stepan, Okhotnikov, Vitalii, Gaydaychuk, AlexanderVolume:
7
Language:
english
Journal:
Coatings
DOI:
10.3390/coatings7090148
Date:
September, 2017
File:
PDF, 7.99 MB
english, 2017