An Inductively-Coupled Plasma Source for the Gaseous...

Journal of Research of the National Institute of Standards and Technology 1995 / 07 Vol. 100; Iss. 4

An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell

Miller, P.A., Hebner, G.A., Greenberg, K.E., Pochan, P.D., Aragon, B.P.
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Volume:
100
Language:
english
Journal:
Journal of Research of the National Institute of Standards and Technology
DOI:
10.6028/jres.100.032
Date:
July, 1995
File:
PDF, 272 KB
english, 1995
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