Characteristics of a VHF H 2...

Japanese Journal of Applied Physics 2015 / 09 Vol. 54; Iss. 9

Characteristics of a VHF H 2 plasma at high pressures for different discharge gaps

Lien, Cheng-Yang, Chen, Chia-Fu, Yang, Ching-Lung, Kawai, Yoshinobu, Chiu, Kuo-Feng, Shi, Jen-Bin, Huang, Sy-Ruen, Wang, Jui-Hao, Tsai, Yu-Jer, Lien, Ting-Kuei
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.096101
Date:
September, 2015
File:
PDF, 1.84 MB
english, 2015
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