Progress in metal organic cluster EUV photoresists

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 11 Vol. 36; Iss. 6

Progress in metal organic cluster EUV photoresists

Sakai, Kazunori, Xu, Hong, Kosma, Vasiliki, Giannelis, Emmanuel P., Ober, Christopher K.
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5050942
Date:
November, 2018
File:
PDF, 1.40 MB
english, 2018
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