Sensitivity Deviation Probability Model of Close Loop...

Micro and Nanosystems 2010 / 03 Vol. 2; Iss. 1

Sensitivity Deviation Probability Model of Close Loop Micro- Accelerometer Based on Comb Finger Gaps MEMS Process Error

Dai, Qiang, Qi, Yu, Zhiyong, Zhong, Wei, Zhou, Huaiwu, Zhang
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Volume:
2
Language:
english
Journal:
Micro and Nanosystemse
DOI:
10.2174/1876402911002010043
Date:
March, 2010
File:
PDF, 581 KB
english, 2010
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