[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Tenth International Workshop on Stress-Induced Phenomena in Metallization - Austin (Texas) (5–7 November 2008)] AIP Conference Proceedings - Repair of Dielectric Interfaces with Chemistry Specific Coupling Agents
Lane, Michael W., Roush, Abigail, Callahan, Stephen E., Ho, Paul S., Zschech, Ehrenfried, Ogawa, ShinichiYear:
2009
Language:
english
DOI:
10.1063/1.3169269
File:
PDF, 3.09 MB
english, 2009