[IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao, China (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Microfabrication and Characterization of Parylene AF4
Xu, Han, Hua, Yu-Chao, Cao, Bing-Yang, Wang, WeiYear:
2018
Language:
english
DOI:
10.1109/ICSICT.2018.8565019
File:
PDF, 3.19 MB
english, 2018