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Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane
Fainer, N. I., Pushkarev, R. V., Ehrenburg, S. B., Trubina, S. V., Shestakov, V. A., Merenkov, I. S., Terauchi, M.Volume:
59
Language:
english
Journal:
Journal of Structural Chemistry
DOI:
10.1134/S0022476618070107
Date:
December, 2018
File:
PDF, 938 KB
english, 2018