Effect of Fluoride Ions on Wet Etching of Copper/...

Journal of Nanoscience and Nanotechnology 2019 / 03 Vol. 19; Iss. 3

Effect of Fluoride Ions on Wet Etching of Copper/ Molybdenum in Hydrogen Peroxide Solution

Kim, Jeong-Hyeon, Bae, Jin-Won, Park, Jae-Young, Im, Myeong-Sik, Kim, Byoung-O, Seo, Jong-Hyun
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Volume:
19
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2019.16206
Date:
March, 2019
File:
PDF, 2.77 MB
english, 2019
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