Coating of overstoichiometric transition metal nitrides (TMN x (x > 1)) by magnetron sputtering
Musil, Jindřich, Kos, Šimon, Jaroš, Martin, Čerstvý, Radomír, Haviar, Stanislav, Zenkin, Sergei, Čiperová, ZuzanaVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/aaec83
Date:
February, 2019
File:
PDF, 1.46 MB
english, 2019