In situ formation of Hf-based...

Japanese Journal of Applied Physics 2018 / 11 Vol. 57; Iss. 11

In situ formation of Hf-based metal/oxide/nitride/oxide/silicon structure for nonvolatile memory application

Kudoh, Sohya, Ohmi, Shun-ichiro
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.114201
Date:
November, 2018
File:
PDF, 1.95 MB
english, 2018
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