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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Production-Worthy USJ Formation by Self-Regulatory Plasma Doping Method
Sasaki, Y., Ito, H., Okashita, K., Tamura, H., Jin, C. G., Mizuno, B., Okumura, T., Aiba, I., Fukagawa, Y., Sauddin, H., Tsutsui, K., Iwai, H.Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401571
File:
PDF, 643 KB
english, 2006