Dynamic SIMS, spectroscopic ellipsometry and x-ray...

Semiconductor Science and Technology 2019 / 01 Vol. 34; Iss. 1

Dynamic SIMS, spectroscopic ellipsometry and x-ray diffractometry analysis of SiGe HBTs with Ge grading

Bärwolf, F, Fursenko, O, Zaumseil, P, Yamamoto, Y
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Volume:
34
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aaf3e2
Date:
January, 2019
File:
PDF, 1.06 MB
english, 2019
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