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High sensitivity all-optical acoustic pressure sensor based on resonant micro-opto-mechanical cantilever with integrated rib waveguide
Li, Wei, Wang, Zihu, Feng, Chuhuan, Li, Qi, Yu, HongbinVolume:
285
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2018.11.035
Date:
January, 2019
File:
PDF, 2.67 MB
english, 2019