Fabrication of diffractive elements using matrix laser...

Fabrication of diffractive elements using matrix laser lithography

Škereň, Marek, Svoboda, Jakub, Květoň, Milan, Fiala, Pavel, Šulc, Miroslav, Kopecký, Václav, Lédl, Vít, Melich, Radek, Škereň, Marek
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Volume:
48
Year:
2013
Language:
english
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/20134800023
File:
PDF, 19.39 MB
english, 2013
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