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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Annular-Encapsulation Packaging to Realize High-Performance MEMS Thermal Wind Sensor
Ye, Yizhou, Wang, Zhenjun, Yi, Zhenxiang, Qin, Ming, Huang, Qing-AnYear:
2018
Language:
english
DOI:
10.1109/NEMS.2018.8557002
File:
PDF, 1.49 MB
english, 2018