[IEEE 2018 15th International Multi-Conference on Systems, Signals & Devices (SSD) - Yassmine Hammamet, Tunisia (2018.3.19-2018.3.22)] 2018 15th International Multi-Conference on Systems, Signals & Devices (SSD) - Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer
Hadi Said, M., Tounsi, F., Mezghani, B., Ahmed, A., Pandit, S., Patkar, R., Dixit, P., Baghin, M.S., Rao, V.R.Year:
2018
Language:
english
DOI:
10.1109/SSD.2018.8570360
File:
PDF, 608 KB
english, 2018