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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Time Dependence Study Of Hydrogen-Induced Defects In Silicon During Thermal Anneals
Personnic, S., Tauzin, A., Bourdelle, K. K., Letertre, F., Kernevez, N., Laugier, F., Cherkashin, N., Claverie, A., Fortunier, R.Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401463
File:
PDF, 528 KB
english, 2006