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The importance of thermal dissociation in CO2 microwave discharges investigated by power pulsing and rotational Raman scattering
van den Bekerom, Dirk, Palomares Linares, Jose Maria, Verreycken, Tiny, Van Veldhuizen, Eddie M, Nijdam, Sander, Bongers, Waldo, Van de Sanden, Richard, Van Rooij, Gerard JLanguage:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aaf519
Date:
November, 2018
File:
PDF, 2.53 MB
english, 2018