![](/img/cover-not-exists.png)
Investigation of gas discharge features during HiPIMS using optical emission spectroscopy
Karzin, V V, Karapets, K IVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012029
Date:
July, 2018
File:
PDF, 688 KB
english, 2018