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Features of magnetron sputtering of a doubled Ta/Ti target
Komlev, A E, Shutova, E S, Komlev, A AVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012038
Date:
July, 2018
File:
PDF, 1.07 MB
english, 2018