Features of magnetron sputtering of a doubled Ta/Ti target

IOP Conference Series Materials Science and Engineering 2018 / 07 Vol. 387

Features of magnetron sputtering of a doubled Ta/Ti target

Komlev, A E, Shutova, E S, Komlev, A A
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Volume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012038
Date:
July, 2018
File:
PDF, 1.07 MB
english, 2018
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