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A revisit to atomic layer deposition of zinc oxide using diethylzinc and water as precursors
Cai, Jiyu, Ma, Zhiyuan, Wejinya, Uche, Zou, Min, Liu, Yuzi, Zhou, Hua, Meng, XiangboLanguage:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-018-03260-3
Date:
December, 2018
File:
PDF, 2.12 MB
english, 2018