MEMS Flow Sensor Using Suspended Graphene Diaphragm With...

Journal of Microelectromechanical Systems 2018 / 12 Vol. 27; Iss. 6

MEMS Flow Sensor Using Suspended Graphene Diaphragm With Microhole Arrays

Wang, Qiugu, Wang, Yifei, Dong, Liang
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Volume:
27
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2018.2874231
Date:
December, 2018
File:
PDF, 1.18 MB
english, 2018
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