[IEEE 2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Austin, TX, USA (2018.9.24-2018.9.26)] 2018 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - Topography Simulation of 4H-SiC-Chemical-Vapor-Deposition Trench Filling Including an OrientationDependent Surface Free Energy
Mochizuki, Kazuhiro, Shiyang, Ji, Kosugi, Ryoji, Yonezawa, Yoshiyuki, Okumura, HajimeYear:
2018
Language:
english
DOI:
10.1109/SISPAD.2018.8551735
File:
PDF, 268 KB
english, 2018