Extended the linear measurement range of four-quadrant detector by using modified polynomial fitting algorithm in micro-displacement measuring system
Vo, Quangsang, Zhang, Xiaodong, Fang, FengzhouVolume:
112
Language:
english
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2018.11.036
Date:
April, 2019
File:
PDF, 1.89 MB
english, 2019