Metallic indium segregation control of InN thin films grown...

Results in Physics 2019 / 03 Vol. 12

Metallic indium segregation control of InN thin films grown on Si(1 0 0) by plasma-enhanced atomic layer deposition

An, Yunlai, He, Yingfeng, Wei, Huiyun, Liu, Sanjie, Li, Meiling, Song, Yimeng, Qiu, Peng, Rehman, Abdul, Zheng, Xinhe, Peng, Mingzeng
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Volume:
12
Language:
english
Journal:
Results in Physics
DOI:
10.1016/j.rinp.2018.12.023
Date:
March, 2019
File:
PDF, 2.08 MB
english, 2019
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