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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array
Uno, Akiko, Hirai, Yoshikazu, Tabata, Osamu, Tsuchiya, ToshiyukiYear:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346652
File:
PDF, 676 KB
english, 2018