[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) -...

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[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - A CMOS-MEMS CC-beam metal resoswitch for zero quiescent power receiver applications

Lu, Shi-Chuan, Tsai, Chun-Pu, Li, Wei-Chang
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Year:
2018
Language:
english
DOI:
10.1109/MEMSYS.2018.8346676
File:
PDF, 1004 KB
english, 2018
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