Estimation of the Heating of a Semiconductor Target Surface...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2018 / 7 Vol. 12; Iss. 4

Estimation of the Heating of a Semiconductor Target Surface by a Low-Energy Electron Beam

Amrastanov, A. N., Seregina, E. V., Stepovich, M. A., Filippov, M. N.
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Volume:
12
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451018040225
Date:
July, 2018
File:
PDF, 679 KB
english, 2018
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