Quantitative SIMS depth profiling of diffusion barrier...

Analytical and Bioanalytical Chemistry 2004 / 06 Vol. 379; Iss. 4

Quantitative SIMS depth profiling of diffusion barrier gate-oxynitride structures in TFT-LCDs

Sabine Dreer, Peter Wilhartitz, Kurt Piplits, Karl Mayerhofer, Johann Foisner, Herbert Hutter
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Volume:
379
Language:
english
Pages:
6
DOI:
10.1007/s00216-003-2468-y
Date:
June, 2004
File:
PDF, 443 KB
english, 2004
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