![](/img/cover-not-exists.png)
Two-Dimensional Fluid Simulation of Large-Scale, Capacitively-Coupled Plasma Discharge for Display Device Processes
Jeong, YoungDo, Lee, Young Jun, Kwon, Deuk-Chul, Lee, Sang-Jin, Jeon, Jae-Hong, Seo, Jong Hyun, Tong, Lizhu, Choe, HeeHwanVolume:
17
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2017.15167
Date:
November, 2017
File:
PDF, 3.66 MB
english, 2017