Niobium nitride films formed by rapid thermal processing...

Analytical and Bioanalytical Chemistry 2004 / 06 Vol. 379; Iss. 4

Niobium nitride films formed by rapid thermal processing (RTP): a study of depth profiles and interface reactions by complementary analytical techniques

A. Berendes, O. Brunkahl, C. Angelkort, W. Bock, F. Hofer, P. Warbichler, B. O. Kolbesen
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Volume:
379
Language:
english
Pages:
14
DOI:
10.1007/s00216-004-2612-3
Date:
June, 2004
File:
PDF, 783 KB
english, 2004
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