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Kinetic analysis of the chemical processes in the decomposition of gaseous dielectrics by a non-equilibrium plasma - part 2: SF6 and SF6/O2
Bauerfeldt, Glauco F., Arbilla, GracielaVolume:
11
Language:
english
Journal:
Journal of the Brazilian Chemical Society
DOI:
10.1590/s0103-50532000000200005
Date:
April, 2000
File:
PDF, 61 KB
english, 2000