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Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests
Tinoco, Hector A., Holzer, Jakub, Pikálek, Tomáš, Buchta, Zdeněk, Lazar, Josef, Chlupová, Alice, Kruml, Tomáš, Hutař, PavelLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.12.039
Date:
December, 2018
File:
PDF, 1.38 MB
english, 2018