Plasma-enhanced chemical vapor deposition of graphene on...

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Plasma-enhanced chemical vapor deposition of graphene on dielectric substrate in Faraday cage: a kinetic study

Ma, Chen, Xing, Jie, Xu, Tianhao, Hu, Er-Tao, Zheng, Jia-Jin, Yu, Hugo, Yu, Kehan, Wei, Wei
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Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aaf917
Date:
December, 2018
File:
PDF, 530 KB
english, 2018
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