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Chemical States of Piled-up Phosphorus and Arsenic Atoms at the SiO 2 /Si Interface
Yoshimura, Yusuke, Ono, Kanta, Fujioka, Hiroshi, Hayakawa, Shinjiro, Sato, Yoshiyuki, Uematsu, Masashi, Baba, Yuji, Hirose, Kazuyuki, Oshima, MasaharuVolume:
38
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.38S1.552
Date:
January, 1999
File:
PDF, 619 KB
1999