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A novel inverse modeling control for piezo positioning stage
Dinh, To Xuan, Luan, Nguyen Phi, Ahn, Kyoung KwanVolume:
32
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-018-1136-2
Date:
December, 2018
File:
PDF, 4.04 MB
english, 2018