Enhanced cracking in Si/B-doped Si 0.70...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 11 Vol. 36; Iss. 6

Enhanced cracking in Si/B-doped Si 0.70 Ge 0.30 /Si heterostructures via hydrogen trapping effect

Wei, Xing, Xue, Zhongying, Chang, Yongwei, Li, Jiurong, Wang, Gang, Chen, Da, Guo, Qinglei
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5044215
Date:
November, 2018
File:
PDF, 1.08 MB
english, 2018
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