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The influence of ion beam sputtering on the composition of the near-surface region of silicon carbide layers
G. Ecke, R. Kosiba, J. Pezoldt, H. RößlerVolume:
365
Language:
english
Pages:
4
DOI:
10.1007/s002160051471
Date:
September, 1999
File:
PDF, 138 KB
english, 1999