A Fast Thin-Film Electret Pressure Sensor

A Fast Thin-Film Electret Pressure Sensor

Ahtiainen, Simo, Olkkonen, Hannu, Tiitta, Markku
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Volume:
3
Language:
english
Journal:
Recent Patents on Electrical Engineeringe
DOI:
10.2174/1874476111003010045
Date:
January, 2010
File:
PDF, 603 KB
english, 2010
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