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Effects of N 2 O gas addition on the properties of ZnO films grown by catalytic reaction-assisted chemical vapor deposition
Yasui, Kanji, Morioka, Makoto, Kanauchi, Shingo, Ohashi, Yuki, Kato, Takahiro, Tamayama, YasuhiroVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4935334
Date:
November, 2015
File:
PDF, 1.45 MB
english, 2015